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An Interferometric System Used for Testing Micro displacement Automatically(PDF)

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
1998年02期
Page:
53-56
Research Field:
Publishing date:

Info

Title:
An Interferometric System Used for Testing Micro displacement Automatically
Author(s):
Wang Qing Chen Jinbang Chen Lei
School of Electronic Engineering and Optoelectronic Technology,NUST, Nanjing 210094
Keywords:
opt ical inter ferometers automat ion dy namic measurement micro-displacement
PACS:
TH744.3
DOI:
-
Abstract:
An interfer omet ric system for testing dynamic micro-displacement automat ically . The ey epiece o f Contact Ty pe Interferometer is instead with opt ic-elect ro nic detector and imag e acquisit ion device, this system is buil t . Its dynamic test ing range v ar ied from 0 to 20 Lm and precisio n is bet ter than 0. 02 μm w hen a sof tw are is used to analyse interferogr ams. It s hardw are fo rm and the analysis pr inciples of interfero grams are given, and the characterist ics o f a Piezo-Elect ric ( PZT ) is also g iv en precisely .

References:

1 徐孝恩. 接触式干涉仪原理与应用. 北京: 中国计量出版社, 1990. 10~20
2 帕夫利迪斯T . 计算机图形显示和图象处理算法. 吴成柯译. 北京: 科学出版社, 1987. 26~43
3 黄深旺, 陈磊, 陈进榜等. 红外干涉仪调度和测量技术的研究. 光学精密工程, 1996, 4( 2) :98~102
4 中国计量科学研究院. JJG 146-94 量块检定规程. 北京: 中国计量出版社, 1995
5 上海计量技术研究所. JJG 101-81 接触式干涉仪检定规程. 北京: 计量出版社, 1981

Memo

Memo:
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Last Update: 2013-03-29