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Study on Silicon Micro-accelerometers Applied to Fuze Solid State Safety System(PDF)

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
2000年03期
Page:
277-280
Research Field:
Publishing date:

Info

Title:
Study on Silicon Micro-accelerometers Applied to Fuze Solid State Safety System
Author(s):
XiZhanwen
Scientific Research Department,NUST,Nanjing 210094
Keywords:
fuze safety and arming system accelerometer microelect riolmechanical system
PACS:
TJ432
DOI:
-
Abstract:
MEMS w ill provide a technology support that other technologies could not do for development of fuze. This paper describes the conception and principle of fuze solid safety and arming system based on MEMS. For silicon piezoresist ive accelerometers applied to fuze safety and arming system, finite element method is used to calculate the st ress dist ribut ion of cantilever beam w ith a dif ferent thickness under accelerat ion of 10 000g , inherent frequency, to design piezoresistor bridge, to compute sensit ivity of sensor. The fabricat ion of piezoresist ive accelerometer is also introduced.

References:

1 Dav is B S. Using low- cost MEMS accelerometers and gyroscopes as strapdown IMUs on rolling projectiles. US Army Research Laboratory , MD21005- 5066, 1998
2 Marc M . Fundmentals of micr ofabrication. New York: CRC Pr ess, 1997
3 Richar d S M. Microsenso rs. New Yo rk: IEEE Pr ess, 1991

Memo

Memo:
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Last Update: 2013-03-25