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Three-dimensional Micro Fabrication Technology about Manufacture of Micro System(PDF)

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
2001年03期
Page:
318-322
Research Field:
Publishing date:

Info

Title:
Three-dimensional Micro Fabrication Technology about Manufacture of Micro System
Author(s):
DongTao ZhangWeiyi ① HouLiya
School of Manufacturing Engineering,① School of Mechanics,NUST,Nanjing 210094
Keywords:
micro mechanics manufacture technics 3D fabricat ion
PACS:
TH706
DOI:
-
Abstract:
T his art icle brings forth the definit ion of micro system; it po ints out the dif ferent ia compared w ith normal system, micro-elect ronic system, and the influence on micro fabricat ion technology accounted for the dif ferent ia. This paper analyses the advantages and disadvantages of micro-electronics’ IC technics, the main manufacturing method of micro system at present . It comments on four three-dimensional methods, viz. LIGA, DRIE, Micro-relief and RPM. T he art icle points out how to scheme these methods in order to meet the commercial assorted needs of micro opt ical system, micro liquid system and micro mechanism, etc. At last , this paper sets forw ard some valuable project groups to be researched in the f ield of micro system.

References:

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Last Update: 2013-03-25