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Free Vibration with Nonlinearity for a Resonator of Micro-electro-mechanical System(PDF)

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
2003年05期
Page:
515-519
Research Field:
Publishing date:

Info

Title:
Free Vibration with Nonlinearity for a Resonator of Micro-electro-mechanical System
Author(s):
ChenYunsheng YangGuolai HangYi
School of Mechanical Engineering,NUST,Nanjing 210094
Keywords:
micro-elect ro-mechanical system resonator nonlinearity free vibration
PACS:
TH703
DOI:
-
Abstract:
The nonlinear model of the sing le degree of freedom for a resonator of micro-elect ro-mechanical system( MEMS) is set up. Based on the linearizat ion approach of differential equat ions and the theory of polynomial equat ions, the equilibrium place of free v ibration and the solut ion of frequencies and dynamic response for f ree v ibrat ion on the nonlinear system are discussed. The analy tical solut ions for free vibrat ion on nonlinear system w ith small cubic stiffness are given. There are better referencial values for relevant resonator design.

References:

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Last Update: 2013-03-17