|Table of Contents|

Analysis of Micro-forces between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
2005年05期
Page:
75-78
Research Field:
Publishing date:

Info

Title:
Analysis of Micro-forces between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation
Author(s):
LI Gui-xian~1PENG Yun-feng~1ZHANG Xin~2
1.School of Mechanical and Electronic Engineering,Harbin Institute of Technology,Harbin 150001,China;2.Department of Computer Science and Engineering,Arizona State University,AZ85287,USA
Keywords:
micro-electromechanical systemsmicro-manipulation micro-partsmicro-forces surface condition
PACS:
TH703
DOI:
-
Abstract:
According to the interaction relationships between the micro-parts inMEMS, and the manipulation tools and the micro-objects in micro-manipulation, three models are simplif ied to represent these interaction relationships firstly,with which the negative-power law relationship characteristics of micro-forces between the micro-parts and their distance are reflected. Then based on these models, the micro-forces are analyzed and formulted. Fina-l ly, the influence factors of the micro-forces, such as surface condition, media and const itut ive material of the m-i cro-parts are discussed.The result shows that the surface condit ion is the most important factors in determination of the micro-forces. An influence coefficient of surface roughness is introduced, which facilitates the analysis of the influence of surface condition on micro-forces.

References:

[ 1] 温诗铸, 丁建宁. 微型机械设计基础研究[ J] . 机械工程学报, 2000, 36( 7) : 39- 42.
[ 2] Zhou S. On forces in microelctromechanical systems[ J] . International Journal of Engineering Science, 2003, 41: 313 - 335.
[ 3] Arai F, Ando D, Fukuda T. Micromanipulation based on micro physics) Strategy based on attractive force reduction and stress measurement[ A] . Proc 1995 IEEE/ RSJ Int Conf Intell Robots Syst( IROS 95) ( Vol 2) [ C] . Pittsburgh, PA: IEEE, 1995, 236- 241.
[ 4] Jsraelachvili J, Jacob N. Intermolecular and surface force [M] . London: Academic Press, 1985.
[ 5] 刘克哲. 物理学( 上卷, 第二版) [M] . 北京: 高等教育出版社, 2000.

Memo

Memo:
-
Last Update: 2013-05-29