|Table of Contents|

Compensation of Angle Measurement Error of Circular Gratings for Parallel Dual-joint Coordinate Measuring Machine

《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

Issue:
2009年05期
Page:
659-662
Research Field:
Publishing date:

Info

Title:
Compensation of Angle Measurement Error of Circular Gratings for Parallel Dual-joint Coordinate Measuring Machine
Author(s):
YU Lian-dongDING YangCHENG Wen-tao
School of Instrument Science and Optoelectronic Engineering,Hefei University ofTechnology,Hefei 230009,China
Keywords:
parallel dual-joint coordinate measuring machines circular gratings error compensation
PACS:
TH721
DOI:
-
Abstract:
This paper investigates the measurement principle and model of a parallel dual-joint coordinate measuring machine(PD-CMM) which has three degrees of freedom(DOF).The influence of the angle measurement errors of the circular gratings on the measurement precision of PD-CMM is analyzed.The error compensation equations are analyzed,and based on the equations,the measurement model of the PD-CMM is optimized.Using a multifaceted prism and an autocollimator,the angle measurement errors of the two circular gratings are inspected.The measurement precisions of the PD-CMM after and before the error compensation of the angle measurement errors of the circular gratings are compared.The results show that the limit deviation decreases from 0.033 mm to 0.015 mm,and the standard deviation decreases from 0.0141 mm to 0.0061 mm.The precision of the PD-CMM can be extremely improved by correcting the angle measurement errors of the two circular gratings.

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Last Update: 2012-11-19