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Structure and Optical Properties of Metal Doped TiO2 Thin Films Deposited by Electron Beam Evaporation


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Structure and Optical Properties of Metal Doped TiO2 Thin Films Deposited by Electron Beam Evaporation
ZHOU Bing1JIANG Xiao-hong1SHEN Rui-qi1LU Lu-de1ROGACHEV A.V.2
1.School of Chemical Engineering,NUST,Nanjing 210094,China;2.Department of Physics,Gomel State University,Gomel 246653,Belarus
titanium dioxide films anatase electron beam evaporation metal-doping band gap photocatalysis
The titanium dioxide(TiO2) thin film and Fe,Cu,Al-doped TiO2 films are prepared by electron beam evaporation on glass substrates.The crystal structures,compositions and surface micrographs of films are studied by means of X-ray diffraction(XRD),Raman spectrum,X-ray photo-electron spectroscopy(XPS) and atomic force microscopy(AFM).The results show that the anatase phase films obtained at doping content of 1% and annealing temperature of 773 K are mainly composed of TiO2.The grain size of films changes obviously as the doped metal ion varies.The optical properties of metal-TiO2 films are analyzed by ultraviolet-visible(UV-Vis) spectral,and the optical band gap of Fe,Cu,Al-TiO2 films narrow from 3.24 eV of TiO2 thin films to 2.98 eV,3.10 eV,3.18 eV respectively.The degradation of methyl orange shows that TiO2 films and metal-TiO2 films possess photocatalytic activity and Fe-TiO2 film has higher degradation efficiency.


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Last Update: 2012-11-02