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Temperature characteristic of natural frequency of doublemass silicon micromechanical gyroscope


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Temperature characteristic of natural frequency of doublemass silicon micromechanical gyroscope
Feng RuiQiu AnpingShi QinSu Yan
School of Mechanical Engineering,NUST,Nanjing 210094,China
silicon micromechanical gyroscopenatural frequencytemperature characteristicringdown
In order to improve the thermal performance of doublemass silicon micromechanical gyroscope,this paper studies the temperature characteristic of gyroscope’s natural frequency.The theoretical calculations and finite element simulations are done on the temperature performance that the natural frequency changes with the variation of the temperature coefficient of Young’s modulus,the thermal stress and the thermal expansion of materials respectively.To avoid the measure errors caused by circuit,parasitic capacitances and other factors,and based on the theory of ringdown,a novel method is introduced to measure the natural frequency.Using this method,some gyroscopes are experimented in a high accurate thermostat.The natural frequencies at different temperatures are measured and the temperature coefficient of natural frequency is calculated.The error analyses show that this method is particularly fit for measuring natural frequency of a high quality factor gyroscope,and the accuracy is high.These experimental results verify that theoretical analysis and simulation are correct.The results indicate that the temperature coefficient of the Young’s modulus is the most critical factor that affects the gyroscope’s natural frequency and the natural frequency is linear with temperature.The research results provide a theoretical guide for doublemass silicon micromechanical gyroscope thermal design.


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Last Update: 2013-02-15