[1]李瑰贤,彭云峰,张 欣.微机械构件间和微操作过程中的力及影响因素分析[J].南京理工大学学报(自然科学版),2005,(05):75-78.
 LI Gui-xian~,PENG Yun-feng~,ZHANG Xin~.Analysis of Micro-forces between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation[J].Journal of Nanjing University of Science and Technology,2005,(05):75-78.
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微机械构件间和微操作过程中的力及影响因素分析
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《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

卷:
期数:
2005年05期
页码:
75-78
栏目:
出版日期:
2005-10-30

文章信息/Info

Title:
Analysis of Micro-forces between Micro-parts and Their Infulence Factors in MEMS and Micro-manpiulation
作者:
李瑰贤1 彭云峰1 张 欣2
1. 哈尔滨工业大学机电工程学院, 黑龙江哈尔滨150001;
2. 亚利桑那州立大学计算机与工程系, 亚利桑那85287, 美国
Author(s):
LI Gui-xian~1PENG Yun-feng~1ZHANG Xin~2
1.School of Mechanical and Electronic Engineering,Harbin Institute of Technology,Harbin 150001,China;2.Department of Computer Science and Engineering,Arizona State University,AZ85287,USA
关键词:
微机械 微操作 微构件 微观力 表面形貌
Keywords:
micro-electromechanical systemsmicro-manipulation micro-partsmicro-forces surface condition
分类号:
TH703
摘要:
根据微机械中构件与构件、微操作中操作工具与操作对象在执行功能动作时的相互作用关系特点,以及微观情况下微观力与构件间距及特征尺寸之间的负幂关系特点,将其简化成3种常见的作用关系模型,即平板与平面(半空间)基体、球与平面(半空间)基体和球与球基体,然后基于该模型,分析了微构件间和微操作过程中的微观力,推导了部分力的计算公式。同时,对诸如表面形貌、介质以及材料等力的影响因素进行了研究,结果表明微构件的表面形貌对微观力的影响最为显著。
Abstract:
According to the interaction relationships between the micro-parts inMEMS, and the manipulation tools and the micro-objects in micro-manipulation, three models are simplif ied to represent these interaction relationships firstly,with which the negative-power law relationship characteristics of micro-forces between the micro-parts and their distance are reflected. Then based on these models, the micro-forces are analyzed and formulted. Fina-l ly, the influence factors of the micro-forces, such as surface condition, media and const itut ive material of the m-i cro-parts are discussed.The result shows that the surface condit ion is the most important factors in determination of the micro-forces. An influence coefficient of surface roughness is introduced, which facilitates the analysis of the influence of surface condition on micro-forces.

参考文献/References:

[ 1] 温诗铸, 丁建宁. 微型机械设计基础研究[ J] . 机械工程学报, 2000, 36( 7) : 39- 42.
[ 2] Zhou S. On forces in microelctromechanical systems[ J] . International Journal of Engineering Science, 2003, 41: 313 - 335.
[ 3] Arai F, Ando D, Fukuda T. Micromanipulation based on micro physics) Strategy based on attractive force reduction and stress measurement[ A] . Proc 1995 IEEE/ RSJ Int Conf Intell Robots Syst( IROS 95) ( Vol 2) [ C] . Pittsburgh, PA: IEEE, 1995, 236- 241.
[ 4] Jsraelachvili J, Jacob N. Intermolecular and surface force [M] . London: Academic Press, 1985.
[ 5] 刘克哲. 物理学( 上卷, 第二版) [M] . 北京: 高等教育出版社, 2000.

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备注/Memo

备注/Memo:
作者简介: 李瑰贤( 1941- ) , 女, 黑龙江哈尔滨人, 教授, 博士生导师, 主要研究方向: 特种传动及控制, 微机械动力学, Email: Ligx@ hit. edu. cn。
更新日期/Last Update: 2013-05-29