[1]张琳,冯红艳,朱顺官,等.半导体桥等离子体的光学诊断[J].南京理工大学学报(自然科学版),2011,(01):127-131.
 ZHANG Lin,FENG Hong-yan,ZHU Shun-guan,et al.Optical Diagnosis on Semiconductor Bridge Plasma[J].Journal of Nanjing University of Science and Technology,2011,(01):127-131.
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半导体桥等离子体的光学诊断
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《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

卷:
期数:
2011年01期
页码:
127-131
栏目:
出版日期:
2011-02-28

文章信息/Info

Title:
Optical Diagnosis on Semiconductor Bridge Plasma
作者:
张琳冯红艳朱顺官张文超
南京理工大学化工学院,江苏南京210094
Author(s):
ZHANG LinFENG Hong-yanZHU Shun-guanZHANG Wen-chao
School of Chemical Engineering,NUST,Nanjing 210094,China
关键词:
半导体桥等离子体 等离子体成分 辐射强度 等离子体速度
Keywords:
semiconductor bridge plasma plasma components radiant intensity plasma speeds
分类号:
O657. 3
摘要:
为了克服半导体桥( SCB) 等离子体尺寸小、存在时间短的局限性问题,用发射光谱法和 增强型电荷耦合器件( ICCD) 研究了SCB 等离子体的特性。原子发射光谱表明SCB 等离子体 成分包括铝原子、铁原子、铜原子、铜离子、硅原子和硅离子。根据Stark 展宽法,用AlⅠ394. 40 nm 计算等离子体的电子密度为1016cm-3。等离子体尺寸约为500 ~ 2 000 μm。在延时为1 μs 时刻,等离子体径向速度约为1 km/s,轴向约为0. 7 km/s,在5 μs 时降到最小。研究结果为优 化桥体设计和改善装药条件等研究提供了依据。该方法提供了一种瞬态小尺寸等离子体的诊 断途径。
Abstract:
To overcome the restriction of small size and short duration of semiconductor bridge( SCB) plasma,the emission spectral method and intensified charge couple device ( ICCD) are used for the diagnosis of SCB plasma. The emission spectrum indicates that the SCB plasma is comprised of aluminium and iron,copper,silicon atom and also copper and silicon ion. The electron density of plasma is calculated with stark-broadening principle and it is about 1016 cm-3 . The plasma radial and axial sizes are about 500 ~2 000 μm. At the moment of 1 μs,the plasma speed in radial direction is about 1 km/s and the speed in axial direction is 0. 7 km/s. The speed declines to the minimum at 5 μs. The results provide instructions for the SCB plasma chemical reaction analysis,bridge design and charge condition. The analytical technique is suitable for other transient and small-size plasma systems.

参考文献/References:

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备注/Memo

备注/Memo:
基金项目:国家自然科学基金( 50806033) ; 南京理工大学自主科研专项计划( 2010ZYTS024,2010GJYPY013) 作者简介:张琳( 1976-) ,女,博士,副研究员,主要研究方向: 光谱分析,E-mail: l_njust@ yahoo. com. cn。
更新日期/Last Update: 2012-02-28