[1]凤瑞,裘安萍,施芹,等.双质量硅微机械陀螺固有频率温度特性研究[J].南京理工大学学报(自然科学版),2013,37(01):94.
 Feng Rui,Qiu Anping,Shi Qin,et al.Temperature characteristic of natural frequency of doublemass silicon micromechanical gyroscope[J].Journal of Nanjing University of Science and Technology,2013,37(01):94.
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双质量硅微机械陀螺固有频率温度特性研究
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《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

卷:
37卷
期数:
2013年01期
页码:
94
栏目:
出版日期:
2013-02-28

文章信息/Info

Title:
Temperature characteristic of natural frequency of doublemass silicon micromechanical gyroscope
作者:
凤瑞裘安萍施芹苏岩
南京理工大学 机械工程学院,江苏 南京 210094
Author(s):
Feng RuiQiu AnpingShi QinSu Yan
School of Mechanical Engineering,NUST,Nanjing 210094,China
关键词:
硅微机械陀螺固有频率温度特性振铃
Keywords:
silicon micromechanical gyroscopenatural frequencytemperature characteristicringdown
分类号:
U666.12
摘要:
为提高双质量硅微机械陀螺温度特性,该文对陀螺固有频率进行了温度特性研究。分别对杨氏模量温度系数、热应力和材料的热膨胀系数三种因素导致的陀螺固有频率随温度变化特性进行了理论数值计算和有限元仿真分析。为避免由于电路、杂散电容和其他因素引入的测量误差,提出了基于振铃原理的硅微机械陀螺固有频率测量方法。采用该方法在高精度恒温箱中测量了不同环境温度下双质量硅微机械陀螺的固有频率,并计算了陀螺固有频率温度系数。误差分析表明该测量方法测量高品质因数陀螺的固有频率精确度高。实验数据验证了理论分析和仿真结果,杨氏模量温度系数是导致硅微机械陀螺固有频率随温度变化的最主要因素,并且硅微陀螺固有频率与温度近似成线性关系。研究结论为双质量硅微机械陀螺的温度优化设计提供了理论依据。
Abstract:
In order to improve the thermal performance of doublemass silicon micromechanical gyroscope,this paper studies the temperature characteristic of gyroscope’s natural frequency.The theoretical calculations and finite element simulations are done on the temperature performance that the natural frequency changes with the variation of the temperature coefficient of Young’s modulus,the thermal stress and the thermal expansion of materials respectively.To avoid the measure errors caused by circuit,parasitic capacitances and other factors,and based on the theory of ringdown,a novel method is introduced to measure the natural frequency.Using this method,some gyroscopes are experimented in a high accurate thermostat.The natural frequencies at different temperatures are measured and the temperature coefficient of natural frequency is calculated.The error analyses show that this method is particularly fit for measuring natural frequency of a high quality factor gyroscope,and the accuracy is high.These experimental results verify that theoretical analysis and simulation are correct.The results indicate that the temperature coefficient of the Young’s modulus is the most critical factor that affects the gyroscope’s natural frequency and the natural frequency is linear with temperature.The research results provide a theoretical guide for doublemass silicon micromechanical gyroscope thermal design.

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备注/Memo

备注/Memo:
基金项目:南京理工大学自主科研专项计划资助项目(2010GJPY002)
作者简介:凤瑞(1985-),男,博士生,主要研究方向:硅微惯性器件,Email:ahngfengrui@yahoo.com.cn;
通讯作者:苏岩(1967-),男,教授,博士生导师,主要研究方向:MEMS传感技术,Email:suyan@njust.edu.cn。
更新日期/Last Update: 2013-02-15