[1]聂伟荣,席占稳,李启磊.一种MEMS保险机构的工艺模拟和静态特性仿真分析[J].南京理工大学学报(自然科学版),2010,(02):166-169.
 NIE Wei-rong,XI Zhan-wen,LI Qi-lei.Process-simulation and Static Characteristic Simulation Analysis of MEMS-based Safety and Arming Device[J].Journal of Nanjing University of Science and Technology,2010,(02):166-169.
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一种MEMS保险机构的工艺模拟和静态特性仿真分析
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《南京理工大学学报》(自然科学版)[ISSN:1005-9830/CN:32-1397/N]

卷:
期数:
2010年02期
页码:
166-169
栏目:
出版日期:
2010-04-30

文章信息/Info

Title:
Process-simulation and Static Characteristic Simulation Analysis of MEMS-based Safety and Arming Device
作者:
聂伟荣 席占稳 李启磊
南京理工大学机械工程学院, 江苏南京210094
Author(s):
NIE Wei-rongXI Zhan-wenLI Qi-lei
School of Mechanical Engineering,NUST,Nanjing 210094,China
关键词:
微机电系统 引信 保险机构 仿真
Keywords:
micro-electro-mechanical system fuzes safety and arming device simulation
分类号:
TJ430.1
摘要:
该文依据引信安全系统设计准则,设计了一种引信用MEMS保险机构。通过分析该机构的工作原理和作用过程可知,该机构可以满足引信依据双环境信息解除保险的安全性设计要求。采用仿真软件CoventorWare对该MEMS机构进行了工艺模拟和仿真,给出该MEMS保险机构的UV-LIGA加工工艺过程。UV-LIGA加工工艺中分别采用2次微电铸过程,得到固连在基板上的运动机构。最后借助ANSYS对该保险机构的力学性能进行了有限元分析,分析结果表明,该机构能够在应力允许范围达到运动位移要求。
Abstract:
According to the criterion of the fuze safety and arming(S&A) system,a new MEMS device that can be used in fuze is designed here.The principles and action process of the MEMS device are analyzed.Its S&A features can satisfy the dual environment guide lines of fuze design.The manufacturing process and static characteristic of the MEMS device are simulated by the software of CoventorWare.The device can be manufactured by improved UV-LIGA.The improved UV-LIGA includes two turns of electroforming,so the movable structure that links the basis can be obtained.The mechanical features of the device are analyzed by ANSYS and the results show that it can reach the anticipant displacement within permitted stress.

参考文献/References:

[1] Joseph L. US Arm y RDECOM ARDEC Perspective [ EB /OL ]. http: / /www. dtic. m il/nd ia /2006 fuze / 2006 fuze. h tm .l 2006- 05- 09.
[2] Steven SM. M icroelectrom echan ica l system (MEM S) interrupter for safe and a rm dev ices[ D]. Oh io: A ir Fo rce Institute of Techno logy, A irUn ive rsity, 2006.
[3] 冯鹏洲, 朱继南, 吴志亮. 美国典型MEM S引信安 全保险装置分析[ J]. 探测与控制学报, 2007, 29( 5): 26- 30.
[4] 石庚辰, 李华. 引信MEMS远距离解除保险机构[ J]. 探测与控制学报, 2007, 30( 3): 1- 4.
[5] 谢锦超. 机电一体化引信安全执行机构设计[ J]. 制导与引信, 2004, 25( 1) : 21- 24.
[6] 郝永平, 刘凤丽, 刘世明. MEMS设计模拟与仿真系 统应用[M ]. 北京: 国防工业出版社, 2007: 139- 159.
[7] 刘晓明, 朱钟淦. 微机电系统设计与制造[M ]. 北 京: 国防工业出版社, 2006: 248- 259.

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备注/Memo

备注/Memo:
作者简介: 聂伟荣( 1969- ) , 女, 博士, 副教授, 主要研究方向: 智能探测与控制技术, 微机电系统设计及制造技 术, 微机电系统应用, E-mail: niew r@ ho tmail. com。
更新日期/Last Update: 2010-04-30